A microgripper using piezoelectric actuation for micro-object manipulation
نویسندگان
چکیده
Design, fabrication and tests of a monolithic compliant-flexure-based microgripper were performed. The geometry design and the material tresses were considered through the finite element analysis. The simulation model was used to study in detail profiles of von Mises stresses nd deformation. The maximum stress in the microgripper is much smaller than the critical stress values for fatigue. The microgripper prototype as manufactured using micro-wire electrode discharge machining. A displacement amplification of 3.0 and a maximum stroke of 170 m were chieved. The use of piezoelectric actuation allowed fine positioning. Micromanipulation tests were conducted to confirm potential applications of he microgripper with piezoelectric actuation in handling micro-objects. The simulation and experimental results have proven the good performance f the microgripper. 2006 Elsevier B.V. All rights reserved.
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